The Study of Thermal Radiative Properties of Silicon Wafers with Various Thin Films by Temperature Changes
The Study of Thermal Radiative Properties of Silicon Wafers with Various Thin Films by Temperature Changes
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不同薄膜硅片温度变化热辐射特性研究
DOI:
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发表时间:
2004
期刊:
影响因子:
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通讯作者:
S.Saido
中科院分区:
文献类型:
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作者:
T.Kiya;T.Sasaki;K.Kikuta;T.Chikahisa;Y.Hishinuma;H.Hongo;S.Saido