Wavelength-Swept VCSELs
Wavelength-Swept VCSELs
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DOI：
10.1109/jstqe.2017.2707181
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发表时间：
2017-11-01
影响因子：
4.9
通讯作者：
Chang-Hasnain, Connie J.
中科院分区：
文献类型：
--
作者：
Qiao, Pengfei;Cook, Kevin T.;Chang-Hasnain, Connie J.
能够连续调谐激光的波长至关重要，并且是许多光学系统的基本构建模块，包括波分复用光纤通信系统。垂直腔面发射激光器（VCSEL）结构由于其超短腔长，固有地支持单法布里 - 珀罗模式，在设计激光波长方面具有独特优势。因此，VCSEL腔厚度的连续变化会导致VCSEL波长的连续扫描。在过去的二十年中，波长可调谐VCSEL一直是人们高度关注的课题。将VCSEL的部分或全部顶部反射镜集成到光学微机电结构（MEMS）中，已经有连续波长扫描的相关报道。单片集成结合了两种技术的优势，在连续扫描波长范围上实现了前所未有的性能。此外，随着超薄高对比度光栅和超结构（HCG/HCM）的进步，MEMS - VCSEL的波长调谐速度已提高到1 - 10 MHz范围。这类激光器现在被称为波长扫描激光器，正在光学相干断层扫描以及光探测和测距系统中开启新的应用。在本文中，我们回顾了MEMS - VCSEL的各种结构以及近期进展。我们总结了微机械可调谐VCSEL在设计和性能方面的一些早期突破，包括基于HCG/HCM的在850、1060和1550 nm波长区域发射的MEMS - VCSEL的进展。此外，我们报道了一种全新的设计，在1060 nm中心波长处，以600 kHz的速度实现了创纪录的高三角波长/初始波长（triangle lambda/lambda(o)）= 6.9%的调谐比。
The ability to continuously tune the wavelength of a laser is of critical importance and is a fundamental building block for many optical systems, including wavelength division multi-plexed optical fiber communication systems. Vertical cavity surface emitting laser (VCSEL) structure offers a unique advantage to engineer the lasing wavelength because of its ultrashort cavity length, inherently supporting a single Fabry-Perot mode. Hence, a continuous change in VCSEL cavity thickness leads to a continuous sweep of VCSEL wavelength. Wavelength-tunable VCSELs have been a subject of intense interest for the last two decades. Incorporating part or entire top mirror of a VCSEL in an optical microelectrome chanical structure (MEMS), continuous wavelength sweeps have been reported. The monolithic integration brings together the best of both technologies and leads to an unprecedented performance in the continuously swept wavelength range. In addition, with the advances of ultrathin high contrast gratings and metastructures (HCG/HCM), the wavelength tuning speed of MEMS-VCSELs has been increased to 1-10 MHz range. Such lasers, now referred as wavelength-swept lasers, are enabling new applications in optical coherent tomography and light detection and ranging systems. In this paper, we review various structures and recent progress of MEMS-VCSELs. We summarize some of the early breakthroughs in designs and properties of micromechanical tunable VCSELs, including advances in HCG/HCM-based MEMS-VCSELs emitting at 850, 1060, and 1550 nm wavelength regimes. In addition, we report a brand new design leading to a record high triangle lambda/lambda(o) = 6.9% tuning ratio with 600 kHz speed at center wavelength of 1060 nm.