Development of new steady-state, low-energy, and high-flux ion beam test device
Development of new steady-state, low-energy, and high-flux ion beam test device
复制标题
新型稳态、低能、高通量离子束测试装置的研制
DOI：
10.1063/1.1461873
复制
发表时间：
2002
影响因子：
1.6
通讯作者：
M. Nishikawa
中科院分区：
文献类型：
--
作者：
T. Shimada;Y. Ueda;A. Sagara;M. Nishikawa
研制了一种新型的稳态、低能、高通量离子束测试装置，用于研究等离子体表面材料在高通量条件下的侵蚀、再沉积和留氢机制。采用2.45 GHz微波电子回旋共振放电产生源等离子体。采用球形多孔径三极管电极进行离子萃取，在焦点处获得较高的离子通量。设计了离子提取孔几何结构，在低能量（<500 eV）的情况下，通过施加高减速电压获得高电流密度。结果表明，在固定的加速电压（束流能量）下，提高减速电压可以产生低能、高通量的束流。当氢束流能量为300 eV时，束流功率密度随着减速电压超过加速-减速比4而迅速增加，最大束流通量为4.1×1020 H/m2 s。另一方面，3 keV氢束. ...的最大束流通量为3.6×1021 H/m2 s
A new steady-state, low-energy, and high-flux ion beam test device has been developed to study erosion, re-deposition, and hydrogen retention mechanisms of plasma facing materials under high flux conditions. Source plasma was produced by electron cyclotron resonance discharge with 2.45 GHz microwave. Ion extraction was made by spherical multiaperture triode electrodes to obtain high ion flux at the focal point. Ion extraction aperture geometry was designed so that high current density can be obtained in the case of low energy (<500 eV) by applying high deceleration voltage. It was demonstrated that low-energy and high-flux ion beam can be produced by increasing deceleration voltage with the fixed acceleration voltage (beam energy). In the case of hydrogen beam energy of 300 eV, beam power density has rapidly increased with a deceleration voltage over accel–decel ratio 4, and maximum beam flux is 4.1×1020 H/m2 s. On the other hand, maximum beam flux of 3.6×1021 H/m2 s was obtained for 3 keV hydrogen beam. ...