Development of coarse/fine dual stage using pneumatically driven bellows actuator and cylinder with air bearings
Development of coarse/fine dual stage using pneumatically driven bellows actuator and cylinder with air bearings
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DOI：
10.1016/j.precisioneng.2010.02.005
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发表时间：
2010-07
影响因子：
3.6
通讯作者：
K. Kawashima;Takeshi Arai;Kotaro Tadano;T. Fujita;T. Kagawa
中科院分区：
文献类型：
--
作者：
K. Kawashima;Takeshi Arai;Kotaro Tadano;T. Fujita;T. Kagawa
本文研制了一种采用气动执行器的单自由度粗/精双定位工作台。粗略的运动利用了一个带有空气轴承的气缸。这种精细的运动利用了由气动波纹管驱动的执行器。采用自行研制的高性能气动伺服阀对粗料台进行控制，最高动态可达300赫兹。精密工作台采用喷嘴挡板式伺服阀控制。细台安装在粗台上。由于所提出的粗/精双工作台是气动驱动的，该工作台具有发热量低、无磁的优点，适合于超精密定位。提出了双级的控制方法。实验结果表明，对于100 mm行程，采用粗平台时，稳态误差小于5μm；采用细平台时，稳态误差最小为20 nm。
In this paper, a coarse/fine dual positioning stage for single degree of freedom using pneumatic actuators is developed. The coarse movement utilizes a pneumatic cylinder with air bearings. The fine movement utilizes an actuator driven by pneumatic bellows. A high-performance pneumatic servo valve, we have developed, having high dynamics up to 300Hz is used to control the coarse stage. The fine stage is controlled with a nozzle-flapper type servo valve. The fine stage is mounted on the coarse stage. As the proposed coarse/fine dual stage is pneumatically driven, the stage has advantages of low heat generation and non-magnetic those are suitable for ultra precise positioning. The control method of the dual stage is proposed. The experimental results demonstrated that the steady state error is less than 5μm for 100mm stroke with the coarse stage and it is minimize to 20nm with the fine stage.