Design of a Recycle Process for Color Filters Using an Arc-Form Tool

Design of a Recycle Process for Color Filters Using an Arc-Form Tool
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DOI:
10.1080/10426910902841084
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发表时间:
2009-05
影响因子:
4.8
通讯作者:
P. Pa
P. Pa
中科院分区:
材料科学2区
文献类型:
--
作者:
P. Pa

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研究了一种采用弧形电极电解加工去除薄膜晶体管液晶显示器(TFT-LCD)彩色滤光片中氧化铟锡(ITO)的新工艺。本研究使用第五代TFT-LCD作为测试案例。更小的弧形工具厚度和端部半径提供了有效的电流密度和更大的放电空间,从而增强了ITO去除工艺。高流动的电解液速度提高了放电迁移率并改善了ITO去除效果。滤色器结合快速进料速率,具有足够的电力来高效去除ITO。
A new process of electrochemical machining (ECM) using an arc-form electrode is investigated for the removal of ITO from thin film transistor liquid crystal display (TFT-LCD) color filters. This study uses a fifth generation TFT-LCD as a test case. A smaller arc-form tool thickness and end radius provides an effective current density and a larger discharge space, enhancing the ITO removal process. A high-flow electrolyte velocity elevates the discharge mobility and improves the ITO removal effect. A color filter, combined with a fast feed rate, has enough electric power for highly effective ITO removal.