Fabrication of nanomaterials using porous alumina templates
Fabrication of nanomaterials using porous alumina templates
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DOI：
10.1023/a:1024479827507
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发表时间：
2003-04-01
影响因子：
2.5
通讯作者：
Shingubara, S
中科院分区：
文献类型：
--
作者：
Shingubara, S
自组织方法的纳米制造引起了人们的广泛关注，因为它可以在不使用昂贵的光刻工具（如电子束曝光系统）的情况下进行大规模生产。多孔氧化铝可以通过铝的阳极氧化电化学制备，通过这种自组织方法，产生高度有序的纳米孔阵列，其尺寸从几百到几十纳米不等。本文综述了多孔氧化铝科学与技术的最新研究，纳米孔阵列自组织条件和机制，利用多孔氧化铝模板形成纳米结构的各种方法，光学和磁性纳米制造，电子纳米器件制造和化学/生物传感器和膜的前景。
Nanofabrication by self-organization methods has attracted much attention owing to the fact that it enables mass production without the use of expensive lithographical tools, such as an electron beam exposure system. Porous alumina can be fabricated electrochemically through anodic oxidation of aluminum by means of such a self-organization method, yielding highly ordered arrays of nanoholes several hundreds down to several tens of nanometers in size. This paper is an overview of recent research on porous alumina science and technology, nanohole array self-organization conditions and mechanisms, various methods of nanostructure formation using porous alumina templates, optical and magnetic nanofabrication, perspectives on electronic nano device fabrication and chemical/biological sensors and membranes.