High-power Q-switched TEM00 mode diode-pumped solid state lasers with > 30W output power at 355nm
High-power Q-switched TEM00 mode diode-pumped solid state lasers with > 30W output power at 355nm
复制标题
DOI：
10.1117/12.659288
复制
发表时间：
2006-02
期刊：
影响因子：
--
通讯作者：
Charles Xiaoyi Wang;Gary Y. Wang;A. Hicks;D. Dudley;Henry Y. Pang;N. Hodgson
中科院分区：
文献类型：
--
作者：
Charles Xiaoyi Wang;Gary Y. Wang;A. Hicks;D. Dudley;Henry Y. Pang;N. Hodgson
自1997年首次商业化推出以来，具有355nm输出的二极管泵浦调q钒酸盐和YAG激光器在功率水平和可靠性方面取得了进步，并且现在在许多工业过程中都取得了合格的成绩，例如通过钻孔，立体光刻，晶圆刻划和切割。目前，355nm的平均输出功率高达20W，脉冲能量为几百微焦耳，脉冲重复率高达150 kHz。在本文中，我们报道了在调q、端泵浦Nd:YVO4和侧泵浦Nd:YAG激光器中，利用LBO中的腔外和频率产生，产生TEM00模式输出功率超过30W的高功率紫外。采用侧泵浦双棒Nd:YAG棒振荡器和腔外三倍频，在355nm处实现了32W输出功率，重复频率为50 kHz。使用末端泵浦的钒酸盐MOPA配置，在TEM00模式下，在100 kHz左右的重复频率下实现了36W的紫外平均功率。给出了寿命测试结果，并讨论了在60W以上的更高紫外功率下的缩放。
Since their first commercial introduction in 1997, diode-pumped Q-switched vanadate and YAG lasers with 355nm output have advanced in power level and reliability and are now qualified in many industrial processes, such as via hole drilling, stereo lithography, wafer scribing and dicing. At present, average output power of up to 20W at 355nm are commercially available with pulse energies of several hundred micro-Joules and pulse repetition rates of up to 150 kHz. In this paper, we report high power UV generation with TEM00 mode output powers in excess of 30W in Q-switched, end-pumped Nd:YVO4 and side-pumped Nd:YAG lasers using extra-cavity sum frequency generation in LBO. With a side-pumped dual-rod Nd:YAG rod oscillator and extra-cavity tripling, 32W output power at 355nm have been achieved at a repetition rate of 50 kHz. With an end-pumped vanadate MOPA configuration, UV average power of 36W with TEM00 mode was realized at repetition rates around 100 kHz. Lifetest results are presented and the scaling to higher UV power of more than 60W is discussed.