Design Issues of Piezoresistive MEMS Accelerometer for an Application Specific Medical Diagnostic System
Design Issues of Piezoresistive MEMS Accelerometer for an Application Specific Medical Diagnostic System
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DOI：
10.1080/02564602.2015.1065713
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发表时间：
2016-01-02
影响因子：
2.4
通讯作者：
Gogoi, Anup Kumar
中科院分区：
文献类型：
--
作者：
Biswas, Sonali;Gogoi, Anup Kumar
This paper reports the design and simulation of finite element method (FEM)-based micro-electro-mechanical-systems (MEMS) piezoresistive accelerometer used in a strapdown medical diagnostic system. A square proofmass with four flexures is used in this design. Here, p-doped single-crystal silicon are used as eight piezoresistors implanted on the flexures for sensing the maximum stress; and they are connected in the form of a wheatstone bridge with each arm containing two piezoresistors. Basically, here two different geometric configuration but of same material have been designed and simulated using FEM-based tool for dynamic range (+/-)2g. To assure better performance characteristics, different analysis for both the configurations are done. Configuration 1 is found to have better performance with respect to load withstanding capability, eigen value analysis, better response characteristic, and low cross-axis sensitivity. Furthermore, the measurement scheme adopted is the wheatstone bridge, which gives better performance as offset is almost nullified.
