DMD-based three-dimensional chromatic confocal microscopy.
DMD-based three-dimensional chromatic confocal microscopy.
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基于dmd的三维彩色共聚焦显微镜。
DOI：
10.1364/ao.386863
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发表时间：
2020-05-10
期刊：
影响因子：
1.9
通讯作者：
Liang, Rongguang
中科院分区：
文献类型：
--
作者：
Li, Shaobai;Liang, Rongguang
本文提出并实现了一种基于数字镜片(DMD)的彩色共焦显微镜，无需任何机械扫描即可获得三维表面轮廓。在该方法中，DMD同时作为多点光源和多个针孔来实现横向扫描。此外，通过共焦光学元件的色差实现了轴向扫描。由于DMD的微镜阵列并不垂直于共焦成像轴线，因此需要进行相应的标定以消除倾斜效应并进行精确的3D成像。目前的光学系统测量范围为45μm，工作光谱范围为505-650 nm，并可通过使用具有较大色差的定制物镜来扩大测量范围。系统的性能已经通过一个多步骤的样本得到了验证。
In this paper, a digital mirror device (DMD)-based chromatic confocal microscopy is proposed and demonstrated for three-dimensional (3D) surface profiling without any mechanical scanning. In this method, the DMD works as the multipoint source and multi-pinhole at the same time to achieve the lateral scanning. Moreover, axial scanning is realized through the chromatic aberration of the confocal optics. Since the micromirror array of the DMD is not perpendicular to the confocal imaging axis, a corresponding calibration is needed to eliminate the tilt effects and perform accurate 3D imaging. The measurement range with the current optical system is 45 μm over 505–650 nm working spectrum and can be increased by using a custom objective with large chromatic aberration. The system performance has been demonstrated with a multistep sample.