Fatigue of ferroelectric PbZr_xTi_yO_3 capacitors with Ru and RuO_x electrodes
Fatigue of ferroelectric PbZr_xTi_yO_3 capacitors with Ru and RuO_x electrodes
复制标题
Ru和RuO_x电极铁电PbZr_xTi_yO_3电容器的疲劳
DOI：
10.1557/jmr.1993.0012
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发表时间：
1993
影响因子：
2.7
通讯作者：
R. Tustison
中科院分区：
文献类型：
--
作者：
S. Bernstein;T. Y. Wong;Y. Kisler;R. Tustison
研究了以Ru和RuOx为电极的PZT铁电电容器的疲劳行为。这些电容器在1 × 10^11次循环后没有出现疲劳迹象，这与铂电极通常观察到的退化形成鲜明对比。与Pt电极相比，初始极化较低，但疲劳后极化与Pt电极相当或大于Pt电极。在1 × 10^11次循环中，观察到开关脉冲和非开关脉冲响应的极化差异大于10 μ C/cm ^2。
The fatigue behavior of ferroelectric PZT capacitors with Ru and RuO_ x electrodes was studied. These capacitors show no sign of fatigue out to 1 X 10^11 cycles, in sharp contrast to the degradation typically observed with Pt electrodes. Compared to Pt electrodes, the initial polarization was lower, but after fatiguing the polarization was comparable to or larger than that for Pt electrodes. Differences in polarization in response to switching and nonswitching pulses greater than 10 μ C/cm^2 were observed at 1 X 10^11 cycles.