Uncertainties in electron probe microanalysis
Uncertainties in electron probe microanalysis
复制标题
电子探针微量分析的不确定性
DOI：
10.1088/1757-899x/7/1/012017
复制
发表时间：
2010
影响因子：
2.2
通讯作者：
S. Leigh
中科院分区：
文献类型：
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作者：
R. Marinenko;S. Leigh
我们使用全球通用的ISO/GUM（国际标准组织/测量不确定度表达指南）确定了WDS-EPMA（波长色散x射线光谱-电子探针微分析）数据的不确定度。对于每个计算，例如在计算k值之前的电流漂移校正和死区校正（未知x射线净校正计数/标准x射线净校正计数），从贡献因素计算不确定度，并将其合并，直到计算出k值的最终联合标准不确定度。我们的例子使用了SiGe合金中Ge Lα x射线线的分析数据。对EPMA结果的不确定性的其他贡献，如矩阵校正程序和质量吸收系数（MACs）被考虑。所有统计计算在达到联合不确定度的过程中都包括在内，并描述了ISO/GUM的基本步骤。
We determined uncertainties for WDS-EPMA (wavelength-dispersive X-ray spectroscopy – electron probe microanalysis) data using the globally accepted ISO/GUM (International Standards Organization/Guide to the Expression of Uncertainty in Measurement). For each calculation, such as the current drift correction and deadtime correction that precede the calculation of a k-value (net corrected X-ray counts of unknown/net corrected X-ray counts of standard), uncertainties were calculated from contributing factors and combined until a final combined standard uncertainty for the k-value was calculated. Our example used data from the analysis of the Ge Lα X-ray line in a SiGe alloy. Additional contributions to uncertainties in EPMA results, such as the matrix correction procedure and mass absorption coefficients (MACs) are considered. All statistical calculations used in the process of arriving at the combined uncertainty are included, and the basic steps of the ISO/GUM are described.