Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide
Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguide
复制标题
DOI：
10.1364/oe.18.020251
复制
发表时间：
2010-09-13
期刊：
影响因子：
3.8
通讯作者：
Hall, Trevor J.
中科院分区：
文献类型：
--
作者：
Bock, Przemek J.;Cheben, Pavel;Hall, Trevor J.
我们报道了一种利用亚波长光栅的新的波导原理的实验演示和分析。与二维光子晶格中的线缺陷等其他周期光波导不同，亚波长光栅光波导像传统的折射率引导结构那样限制光，并且不表现出光学共振行为。绝缘体上硅中的亚波长光栅光波导是通过单一的刻蚀步骤制作的，只需通过光刻图形就可以灵活地控制波导芯的有效折射率。实验测量表明，该亚波长光栅光波导的传输损耗低至2.1db/cm，偏振特性和波长相关损耗可忽略不计，与传统的微光子硅光波导相比具有很大优势。在超过电信C波段的波长范围内，测量的群指数几乎是常数n(G)，类似于1.5。(C)2010年美国光学学会
We report on the experimental demonstration and analysis of a new waveguide principle using subwavelength gratings. Unlike other periodic waveguides such as line-defects in a 2D photonic crystal lattice, a subwavelength grating waveguide confines the light as a conventional index-guided structure and does not exhibit optically resonant behaviour. Subwavelength grating waveguides in silicon-on-insulator are fabricated with a single etch step and allow for flexible control of the effective refractive index of the waveguide core simply by lithographic patterning. Experimental measurements indicate a propagation loss as low as 2.1 dB/cm for subwavelength grating waveguides with negligible polarization and wavelength dependent loss, which compares favourably to conventional microphotonic silicon waveguides. The measured group index is nearly constant n(g) similar to 1.5 over a wavelength range exceeding the telecom C-band. (C) 2010 Optical Society of America