A novel ultra-compact resonator for Superconducting thin-film filters
A novel ultra-compact resonator for Superconducting thin-film filters
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DOI：
10.1109/tmtt.2003.819769
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发表时间：
2003-12
影响因子：
4.3
通讯作者：
H. Yi;S. Remillard;A. Abdelmonem
中科院分区：
文献类型：
--
作者：
H. Yi;S. Remillard;A. Abdelmonem
本文提出了一种新型薄膜谐振腔结构，将微带谐振腔和共面谐振腔结合在一起形成一个集成谐振腔。与文献中的薄膜谐振器结构相比，该谐振器结构具有极其紧凑的尺寸，并且理论上表明其谐振频率对衬底厚度不太敏感，甚至不敏感。基于该谐振腔设计了一个八极准椭圆滤波器。利用IE3D软件进行全波电磁仿真，对滤波器的精确布局进行了仿真和优化。全波模拟滤波器响应与理论滤波器响应吻合较好。在直径为2 in的MgO晶圆上外延生长的YBa/sub 2/Cu/sub 3/O/sub 7/双面薄膜上制备了滤光片。在78 K时，测量到的滤波器响应带宽为1.5 MHz，中心频率为850.3 MHz。通带中心的插入损耗为1 dB，对应滤波器Q为28 000。在频带边缘处获得陡峭的抑制斜率，从通带边缘约300 kHz处达到70 dB以上的抑制。在-20-0 dBm之间的输入功率水平没有观察到明显的变化，表明滤波器具有相对较高的功率处理能力。
This paper proposes a novel thin-film resonator structure, which combines the microstrip resonator and the coplanar resonator to form an integrated resonator. This resonator structure has an extremely compact size, as compared to the thin-film resonator structures from the literature, and its resonant frequency was shown theoretically to be less sensitive to, or even insensitive to, the thickness of the substrate. An eight-pole quasi-elliptic filter based on this novel resonator was designed. The exact filter layout was simulated and optimized by full-wave electromagnetic simulation using IE3D software. The full-wave simulated filter response was in good agreement with the theoretical filter response. A filter was fabricated on a double-sided YBa/sub 2/Cu/sub 3/O/sub 7/ thin film epitaxially grown on a 2-in-diameter MgO wafer. The measured filter response showed a bandwidth of 1.5 MHz and a center frequency of 850.3 MHz at 78 K. The insertion loss at the passband center was 1 dB, corresponding to a filter Q of 28 000. Steep rejection slopes were obtained at the band edges and rejections reached over 70 dB in approximately 300 kHz from the passband edges. No pronounced changes were observed for input power levels between -20-0 dBm, indicating a relatively high power-handling capability of the filter.