Silicon smart tactile image sensor with pneumatically swollen single diaphragm structure
Silicon smart tactile image sensor with pneumatically swollen single diaphragm structure
复制标题
气动膨胀单隔膜结构硅智能触觉图像传感器
DOI：
10.1109/mems.2004.1290719
复制
发表时间：
2004
期刊：
影响因子：
--
通讯作者：
M. Ishida
中科院分区：
文献类型：
--
作者：
H. Takao;K. Sawada;M. Ishida
本文介绍了一种具有单膜结构的新型硅触觉图像传感器。这种触觉传感器有一个硅膜触觉传感区域，在该区域上集成了用于触觉成像的二维压阻阵列。通过变形膜上的应力分布可以检测触摸物体的表面形状。MOS信号处理电路也单片集成在膜周围。膜区域通过气压气动膨胀，以获得用于触觉传感的长机械行程。此外，传感区域的机械刚度可在器件制造后通过压力控制。如果根据输入幅度自适应地控制压力，触觉传感器的动态范围将大大提高。通过器件制造和评估，成功检测到接触塑料尖端的形状和位置。压阻的力灵敏度也通过膜压力控制。这种触觉图像传感器在检测像人类指尖这样的三维物体表面形状方面很有前景。
In this paper, a novel silicon tactile image sensor with single diaphragm structure is presented. This tactile sensor has a tactile sensing region of silicon diaphragm on which two-dimensional (2-D) piezoresistor array for tactile imaging is integrated. Surface shape of touching object can be detected from stress distribution on the deformed diaphragm. MOS signal processing circuitry is also integrated around the diaphragm monolithically. The diaphragm region is pneumatically swollen by air-pressure to obtain a long mechanical stroke for tactile sensing. In addition, mechanical stiffness of the sensing region can be controlled by the pressure after device fabrication. If the pressure is adaptively controlled for amplitude of input, dynamic range of the tactile sensor will be much improved. As a result of device fabrication and evaluation, shape and position of a contacting plastic tip were successfully detected. Force sensitivity of piezoresistors was also controlled by the diaphragm pressure. This tactile image sensor is very promising to detect surface shape of 3-D object like human fingertips.