Modified fabrication process for aperture probe cantilevers
Modified fabrication process for aperture probe cantilevers
复制标题
孔径探针悬臂梁的改进制造工艺
DOI：
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发表时间：
1999
影响因子：
2
通讯作者：
E. Oesterschulze
中科院分区：
文献类型：
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作者：
A. Vollkopf;O. Rudow;T. Leinhos;C. Mihalcea;E. Oesterschulze
我们报告了用于扫描近场光学显微镜的基于悬臂梁和光纤的探针的发展。这两个探头的概念依赖于集成的微加工孔径尖端可再现的光学和机械性能。使用有限积分代码进行数值计算，以研究孔径尖端的偏振敏感传输行为。为了建立优化光学尖端性能的技术准则，详细研究了尖端几何形状对孔径附近强度分布的显著影响。
We report the development of cantilever‐ and fibre‐based probes for scanning near‐field optical microscopy. Both probe concepts rely on the integration of a microfabricated aperture tip with reproducible optical and mechanical properties. Numerical calculations were carried out using a finite integration code to investigate the polarization‐sensitive transmission behaviour of aperture tips. In order to establish technological guidelines for the optimization of the properties of the optical tip the distinct influence of the tip geometry on the intensity distribution in the vicinity of the aperture is studied in detail.