Experimental investigation of machinability and surface quality of sapphire machined with polycrystalline diamond micro-milling tool
Experimental investigation of machinability and surface quality of sapphire machined with polycrystalline diamond micro-milling tool
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DOI：
10.1007/s00170-017-0881-1
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发表时间：
2017-12-01
影响因子：
3.4
通讯作者：
Yamazaki, Kazuo
中科院分区：
文献类型：
--
作者：
Katahira, Kazutoshi;Matsumoto, Yuhei;Yamazaki, Kazuo
采用多晶金刚石（PCD）微铣刀对单晶蓝宝石进行了超精密加工。检查的加工特性表明，高品质的表面与纳米级的表面粗糙度，可以得到当去除的芯片是足够薄，以实现延性模式加工。虽然高质量的表面被成功地加工，表面粗糙度逐渐恶化，加工槽的实际深度变浅，因为材料的积累，粘附到工具的表面的加工距离增加。为了保持PCD刀具的铣削能力，已经提出了电化学辅助的表面修复工艺。修复技术被认为是有效的，在消除表面污染物，而不会造成损坏的工具的边缘。
Ultra-precision machining of single crystalline sapphire was performed using a polycrystalline diamond (PCD) micro-milling tool. Examination of the machining characteristics indicates that a high-quality surface with a nanometre-scale surface roughness can be obtained when the removed chips are thin enough to achieve ductile-mode machining. Although a high-quality surface was successfully machined, the surface roughness gradually deteriorated and the actual depth of the machined groove became shallower as the machining distance increased because of the build-up of material adhering to the surface of the tool. To retain the milling capabilities of the PCD tool, an electrochemical-assisted surface reconditioning process has been proposed. The reconditioning technique was found to be effective in removing the surface contaminant without causing damage to the edges of the tool.