ANALYTIC CROSS SECTIONS FOR ELECTRON COLLISIONS WITH CO, CO2, AND H2O RELEVANT TO EDGE PLASMA IMPURITIES
ANALYTIC CROSS SECTIONS FOR ELECTRON COLLISIONS WITH CO, CO2, AND H2O RELEVANT TO EDGE PLASMA IMPURITIES
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与边缘等离子体杂质相关的 CO、CO2 和 H2O 电子碰撞的分析截面
DOI：
10.1006/adnd.2001.0866
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发表时间：
2001
影响因子：
1.8
通讯作者：
H. Tawara
中科院分区：
文献类型：
--
作者：
T. Shirai;Tatsuo Tabata;H. Tawara
摘要 1 eV 以上能量范围内的横截面数据已针对涉及与低温等离子体最相关的杂质物质（CO、CO 2 和 H 2 O）的电子碰撞碰撞过程进行了严格评估。对每个碰撞过程的横截面测量进行了简短回顾。文献调查截至 1999 年 12 月。还提供了对推荐横截面的分析拟合。
Abstract Cross section data in the energy range above 1 eV have been critically evaluated for electron impact collision processes involving the impurity species (CO, CO 2 , and H 2 O) most relevant to low-temperature plasmas. A short review of the cross section measurements is given for each collision process. The literature has been surveyed up to December 1999. Analytic fits to the recommended cross sections are also presented.