Fabrication and Operation of a Microcavity Plasma Array Device for Microscale Surface Modification
Fabrication and Operation of a Microcavity Plasma Array Device for Microscale Surface Modification
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DOI：
10.1002/ppap.201100166
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发表时间：
2012-07-01
影响因子：
3.5
通讯作者：
Steele, David A.
中科院分区：
文献类型：
--
作者：
Al-Bataineh, Sameer A.;Szili, Endre J.;Steele, David A.
通过等离子体处理或沉积对具有微尺度特征的材料进行表面改性具有很高的价值，并且被认为是基于等离子体的材料加工的最大挑战之一。本文报道了一种制作微腔等离子体阵列器件的通用方法。七分？X吗？7微腔等离子体阵列装置（每个腔250？μ m的直径和分离的500？μ m）来证明这些装置用于局部、非接触表面处理/聚合物沉积的能力。该装置可多次重复使用，用于等离子体处理和聚合。X射线光电子能谱（XPS）和飞行时间二次离子质谱（ToF-SIMS）成像和感兴趣的区域（ROI）分析，除了表面水合作用，被用来识别微等离子体处理的PS上的微图案。结果表明，微等离子体处理/沉积可以在空间上局限于暴露于单个点燃的微腔的区域。然而，结果还表明，经处理的斑点的尺寸倾向于随着处理时间的增加而增加，直到它们最终重叠，从而导致局限于阵列尺寸的均匀表面处理。同样地，在处理过的斑点上量化的氧浓度在75？s的治疗。通过在硅衬底上沉积一系列occurrence等离子体聚合物（ODpp）来证明该设备的多功能性，XPS成像和ROI分析证实了这一点。这些微腔阵列装置的关键优点是它们可以容易地集成到制造中，并且不需要与基底表面接触以在材料表面上赋予明确的化学改性。
Surface modification of materials with microscale features through plasma treatment or deposition is of high value, and is considered one of the great challenges in plasma-based materials processing. This article reports a versatile method for the fabrication of microcavity plasma array devices. A 7?X?7 microcavity plasma array device (each cavity was 250?mu m in diameter and separated by 500?mu m) was used in this study to demonstrate the capability of these devices for localised, non-contact surface treatment/polymer deposition. The device can be reused multiple times for plasma treatment and polymerisation. X-ray photoelectron spectroscopy (XPS) and time-of-flight secondary ion mass spectrometry (ToF-SIMS) imaging and region of interest (ROI) analysis, in addition to surface hydration, were employed to characterise the micropatterns on microplasma-treated PS. The results showed that microplasma treatment/deposition could be spatially confined to regions exposed to the individual ignited microcavities. However, the results also demonstrated that the size of the treated spots tended to increase with increasing treatment time until they eventually overlapped resulting in a homogeneous surface treatment confined to the size of the array. Similarly, the concentration of oxygen quantified on the treated spots reached saturation after 75?s of treatment. The versatility of the device was demonstrated by depositing an array of octadiene plasma polymer (ODpp) onto a silicon substrate as confirmed by XPS imaging and ROI analysis. A key advantage of these microcavity array devices is that they can be easily integrated into manufacturing and do not require contact with the substrate surface to impart well-defined chemical modifications on materials surfaces.