A micropump driven by continuous electrowetting actuation for low voltage and low power operations
A micropump driven by continuous electrowetting actuation for low voltage and low power operations
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由连续电润湿驱动驱动的微型泵，用于低电压和低功率操作
DOI：
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发表时间：
2001
期刊：
影响因子：
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通讯作者：
E. Yoon
中科院分区：
文献类型：
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作者：
K. Yun;Il;J. Bu;Geun;Y. Jeon;C. Kim;E. Yoon
本文首次报道了一种连续电润湿驱动的微泵。我们已经使用的表面张力引起的运动的汞滴在微通道中填充有电解质作为驱动能量。我们已经制造了CEW致动器，硅橡胶泵送膜和铜瓣止回阀，并已证明实际液体泵送高达63 /spl mu/l/min，在2.3 Vpp的施加电压。当工作频率为10 Hz，外加电压为2.3 Vpp时，最大泵压约为600 Pa。
In this paper we first report a micropump actuated by continuous electrowetting (CEW). We have used the surface-tension-induced motion of a mercury drop in the microchannel filled with an electrolyte as actuation energy. We have fabricated the CEW actuator, silicone rubber pumping membranes and copper flap check valves, and have demonstrated actual liquid pumping up to 63 /spl mu/l/min at the applied voltage of 2.3 Vpp. The maximum pump pressure is about 600 Pa at the applied voltage of 2.3 Vpp with operation frequency of 10 Hz.