Doubly Clamped Nanobeam as a Piezoresistive Mass Sensor
Doubly Clamped Nanobeam as a Piezoresistive Mass Sensor
复制标题
双钳位纳米束作为压阻质量传感器
DOI：
10.1109/icsens.2007.4388615
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发表时间：
2007
期刊：
影响因子：
--
通讯作者：
Wang Yuelin
中科院分区：
文献类型：
--
作者：
J. Jiwei;Zhao Quanbin;Y. Heng;Li Tie;Li Xinxin;Wang Yuelin
在本文中，我们提出了一种新的技术，以实现一个双夹持纳米梁，这是首选的悬臂，因为它具有较高的固有频率相同的尺寸，作为压阻式质量传感器。在200 nm厚的双夹持纳米梁上施加Ar选择性轰击，以形成与其他普通电阻器一起沿着在惠斯通电桥中的压敏电阻器。该装置是静电驱动和读出压电。在空气中的Q因子和f0的优值积高达3.5倍108，这意味着更好的质量检测分辨率相比，其对应的微悬臂梁，而我们的方法是简单，易于控制。
In this paper, we present a novel technology to realize a doubly clamped nanobeam, which is preferred to cantilever because of its higher natural frequency with a same dimension, as a piezoresistive mass sensor. Ar selective bombardment was applied on a 200 nm thick doubly clamped nanobeam to form a piezoresistor in a Wheaston bridge along with other ordinary resistors. The device was electrostatically actuated and readout piezoresistively. The achieved merit product of Q-factor and f0 in air is as high as 3.5 times 108 , which hints a better mass detection resolution compared with its counterpart of micro cantilever, while our approach is simple and easily controlled.