CMOS Compatible MEMS Air Velocity Sensor With Improved Sensitivity and Linearity for Human Thermal Comfort Sensing Applications
CMOS Compatible MEMS Air Velocity Sensor With Improved Sensitivity and Linearity for Human Thermal Comfort Sensing Applications
复制标题
CMOS 兼容 MEMS 风速传感器具有更高的灵敏度和线性度，适用于人体热舒适感传感应用
DOI：
10.1109/jsen.2021.3115656
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发表时间：
2021
影响因子：
4.3
通讯作者：
Yi
中科院分区：
文献类型：
--
作者：
.. Izhar;Wei Xu;Lung;Yi
在本文中，我们报告了一个优化的CMOS兼容的MEMS热阻量热空气速度（TMCV）传感器，以测量在室内环境中的人体热舒适感测应用的小空气速度。该传感器由两个上游热敏电阻、两个下游热敏电阻以及放置在上游热敏电阻和下游热敏电阻之间的微加热器组成。传感器的尺寸进行了优化，以实现更好的线性度和精度在微小的空气速度范围内（-1 m/s至1 m/s）基于CFD模拟。此外，为了降低加热功率并提高归一化灵敏度，使用DRIE工艺将传感器从衬底上完全释放。该传感器在风洞实验室和真实的室内环境中进行了成功的测试。传感器的最大灵敏度为340.2 mV/（m/s），在−5 m/s ~ 5 m/s风速范围内，相对于加热功率和增益，归一化灵敏度<inline-formula><tex-math notation="LaTeX">为354.37 μ V $</tex-math></inline-formula>/（m/s）/mW。我们的传感器实现的归一化灵敏度远高于大多数报道的TMCV传感器。该传感器在小风速范围内具有良好的线性<inline-formula><tex-math notation="LaTeX">（R ^{2}=0.9996$</tex-math></inline-formula>）和精度（±0.0236 m/s），满足ASHRAE-55和ISO-7726标准的精度要求（< ±0.05）。此外，封装的TMCV传感器在办公室中成功地进行了测试，以测量由HVAC系统产生的非常小的空气速度（<inline-formula><tex-math notation="LaTeX">0 〜\sim 〜 0.5$</tex-math></inline-formula>m/s）。实验结果表明，我们的传感器是非常适合的智能暖通空调系统集成在物联网（IoT）的时代。
In this paper, we report an optimized CMOS compatible MEMS thermoresistive calorimetric air velocity (TMCV) sensor to measure small air velocity in an indoor environment for the application of human thermal comfort sensing. The sensor is comprised of two upstream thermistors, two downstream thermistors, and a micro-heater placed in between the upstream thermistors and downstream thermistors. The dimensions of the sensor were optimized to achieve better linearity and accuracy in the tiny air velocity (−1 m/s to 1 m/s) range based on the CFD simulation. Furthermore, to reduce the heating power and increase the normalized sensitivity, the sensor was completely released from the substrate using the DRIE process. The sensor was successfully tested both in a lab in a wind tunnel and a real indoor environment. The sensor achieved a maximum sensitivity of 340.2 mV/(m/s), and normalized sensitivity, with respect to heating power and gain, of <inline-formula> <tex-math notation="LaTeX">$354.37~\mu \text{V}$ </tex-math></inline-formula>/(m/s)/mW within −5 m/s to 5 m/s air velocity range. The normalized sensitivity achieved by our sensor is much higher than most of the reported TMCV sensors. Besides, the sensor obtained a good linearity (<inline-formula> <tex-math notation="LaTeX">${R}^{2}=0.9996$ </tex-math></inline-formula>) and accuracy (±0.0236 m/s) within the small air velocity range meeting the standard accuracy requirement (< ±0.05) of ASHRAE-55 and ISO-7726 standards. Moreover, the packaged TMCV sensor was successfully tested in an office to measure very small air velocity (<inline-formula> <tex-math notation="LaTeX">$0~\sim ~0.5$ </tex-math></inline-formula> m/s) produced by the HVAC system. The experimental results indicated that our sensor is quite suitable for smart HVAC system integration in the era of the Internet of Things (IoT).