Low-loss channel waveguides and Y-splitter formed by ion-exchange in silica-on-silicon
Low-loss channel waveguides and Y-splitter formed by ion-exchange in silica-on-silicon
复制标题
通过硅基二氧化硅中的离子交换形成低损耗通道波导和 Y 形分路器
DOI：
10.1364/oe.16.003172
复制
发表时间：
2008-03-03
期刊：
影响因子：
3.8
通讯作者：
Xu, Lei
中科院分区：
文献类型：
--
作者：
He, Zian;Li, Yigang;Xu, Lei
在硅衬底上制备了低损耗的离子交换溶胶-凝胶沟道光波导。采用溶胶-凝胶法制备了可离子交换的铝硅酸盐玻璃薄膜。采用Ag+-Li+热离子交换技术实现了单模通道光波导。用缩减法测得其传输损耗为0.50分贝/厘米，耦合损耗为0.76分贝/面。制作了Y分支功率分路器。结果表明，离子交换技术可用于制备薄膜结构的低损耗沟道光波导。(C)2008年美国光学学会。
Low-loss ion-exchanged sol-gel channel waveguides on silicon substrate were fabricated. Ion-exchangeable aluminosilicate glass film was fabricated by sol-gel technique. Ag+-Li+ thermal ion-exchange was used to achieve single mode channel waveguide. Propagation loss of 0.50 dB/cm and coupling loss of 0.76 dB/facet were measured by cutback method. A Y-branch power splitter was also fabricated. The results demonstrate that ion-exchange technique can be applied to prepare low-loss channel waveguides in thin film structures. (c) 2008 Optical Society of America.