Suppressed drift and low-noise sensor module with a single-axis gold proof-mass MEMS accelerometer for micro muscle sound measurement
Suppressed drift and low-noise sensor module with a single-axis gold proof-mass MEMS accelerometer for micro muscle sound measurement
复制标题
DOI：
10.35848/1347-4065/ac5b25
复制
发表时间：
2022-06-01
影响因子：
1.5
通讯作者：
Ito, Hiroyuki
中科院分区：
文献类型：
--
作者：
Onishi, Akira;Shibata, Kohei;Ito, Hiroyuki
介绍了一种用于测量微肌肉声音的高灵敏度微机电系统加速度计传感器模块。在漂移机制方面，我们重点研究了与MEMS制造相关的基于残余水的带电粒子。基于程序升温解吸分析和电学实验，明确了这种漂移是由带负电荷的OH-引起的，真空封装可以抑制这种漂移。通过提高MEMS加速度计的灵敏度，可以降低本底噪声。所研制的MEMS加速度计灵敏度为1157.0 fF/G，布朗噪声为149.0 nG/根Hz。所开发的传感器模块由所开发的MEMS加速度计和电容-数字转换器组成，可实现26.7 μ G/根Hz的本底噪声，无明显漂移，建立了小于50 μ G/根Hz的目标值。因此，证实所开发的传感器模块可以在不收缩肌肉的情况下检测到20-40 Hz频率范围内的微肌肉声音。
This paper describes a highly sensitive microelectromechanical systems (MEMS) accelerometer sensor module to measure micro muscle sounds. Regarding the drift mechanism, we focus on charged particles based on residual water related to MEMS fabrication. Based on temperature programmed desorption analysis and electrical experiments, it is clarified that the drift is caused by negatively charged OH- and is suppressed by vacuum packaging. The noise floor can be reduced by the improved sensitivity of the MEMS accelerometer. The developed MEMS accelerometer can realize the sensitivity of 1157.0 fF/G and Brownian noise of 149.0 nG/root Hz. The developed sensor module consisting of the developed MEMS accelerometer and the capacitance to digital converter can achieve a noise floor of 26.7 mu G/root Hz without any obvious drifts, establishing the target value of less than 50 mu G/root Hz. Therefore, it is confirmed that the developed sensor module can detect micro muscle sounds without contracting a muscle in the frequency range of 20-40 Hz.