Miniature 250 μm Thick Fuel Cell with Monolithically Fabricated Silicon Electrodes
Miniature 250 μm Thick Fuel Cell with Monolithically Fabricated Silicon Electrodes
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DOI：
10.1149/1.1756859
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发表时间：
2004-08
影响因子：
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通讯作者：
M. Hayase;T. Kawase;T. Hatsuzawa
中科院分区：
文献类型：
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作者：
M. Hayase;T. Kawase;T. Hatsuzawa
发展了一种利用硅片制作微型燃料电池电极的技术。在Si晶片中形成燃料通道、多孔层和催化剂层。燃料通道是通过在Si上进行光刻图案化和随后的湿法蚀刻来制造的。多孔层通过从聚合物电解质膜侧通过燃料通道的底部对Si进行阳极氧化而形成。通过湿镀将催化剂金属沉积在多孔层内部。两个电极用Nafion 112片热压。在氢源条件下，开路电压为840 mV，最大功率密度为1.5mW/cm 2。
A fabrication technique of miniature fuel cell electrodes was developed from Si wafers. The fuel channels, porous layer, and catalyst layer were formed in the Si wafer. The fuel channels were fabricated by photolithographic patterning and subsequent wet etching on the Si. The porous layer was formed by anodization of Si from the polymer electrolyte membrane side through the bottom of the fuel channels. Catalyst metals were deposited inside the porous layer by wet plating. The two electrodes were hot-pressed with a Nafion 112 sheet. Open-circuit voltage of 840 mV and maximum power density of 1.5 mW/cm 2 were observed by hydrogen feed.