Impact of granular work function variation in a gate electrodeon low-frequency noise for fin field-effect transistors
Impact of granular work function variation in a gate electrodeon low-frequency noise for fin field-effect transistors
复制标题
栅极电极中粒状功函数变化对鳍式场效应晶体管低频噪声的影响
DOI:
10.7567/apex.8.044201
复制
发表时间:
2015
影响因子:
2.3
通讯作者:
and M. Masahara
中科院分区:
文献类型:
--
作者:
T. Matsukawa;K. Fukuda;Y.X. Liu;J. Tsukada;H. Yamauchi;K. Endo;Y. Ishikawa;S. O’uchi;S. Migita;Y. Morita;W. Mizubayashi;H. Ota;and M. Masahara