Novel Photon-Counting Detector for 0.1–100 keV X-Ray Imaging Possessing High Spatial Resolution
Novel Photon-Counting Detector for 0.1–100 keV X-Ray Imaging Possessing High Spatial Resolution
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具有高空间分辨率的新型 0.1–100 keV X 射线成像光子计数探测器
DOI：
10.1143/jjap.42.l1201
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发表时间：
2003
影响因子：
1.5
通讯作者：
K. Tamura
中科院分区：
文献类型：
--
作者：
E. Miyata;K. Tamura
我们报告一种新的光子计数探测器具有前所未有的空间分辨率，中等光谱分辨率和高背景抑制能力的0.1-100千电子伏的X射线。它由X射线电荷耦合器件（CCD）和闪烁体组成。闪烁体直接沉积在X射线CCD的背面。低于10 keV的低能X射线可以直接在CCD中检测到。大多数高于10 keV的硬X射线通过CCD，但可以在闪烁体中检测到，在那里产生光子。由于CCD对可见光子具有中等的检测效率，因此它们可以再次被CCD吸收。我们证明了17.4 keV的X射线与我们的原型设备的高空间分辨率为10 μm数量级。
We report on a new photon-counting detector possessing unprecedented spatial resolution, moderate spectral resolution and high background-rejection capability for 0.1–100 keV X-rays. It consists of an X-ray charge-coupled device (CCD) and scintillator. The scintillator is directly deposited on the back surface of the X-ray CCD. Low-energy X-rays below 10 keV can be directly detected in the CCD. The majority of hard X-rays above 10 keV pass through the CCD but can be detected in the scintillator, generating optical photons there. Since CCDs have a moderate detection efficiency for optical photons, they can again be absorbed by the CCD. We demonstrate the high spatial resolution of 10 µm order for 17.4 keV X-rays with our prototype device.