Formation of Anti-Reflection Coating by Hydrothermal Treatment of Aluminum Films and Their Stabilization by Dehydration
Formation of Anti-Reflection Coating by Hydrothermal Treatment of Aluminum Films and Their Stabilization by Dehydration
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DOI：
10.2320/matertrans.m2013026
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发表时间：
2013-06
影响因子：
1.2
通讯作者：
A. Egashira;Takuji Ube;Y. Hosoki;T. Harumoto;T. Ishiguro
中科院分区：
文献类型：
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作者：
A. Egashira;Takuji Ube;Y. Hosoki;T. Harumoto;T. Ishiguro
通过在超纯水中对Al膜进行水热处理获得了显示出比玻璃基板本身更高的透射率的抗反射涂层，并且水热处理的Al膜由透明勃姆石（羟基氧化铝）组成（J.Appl.Phys.106（2009）023524）。然而，水热处理的膜的稳定性是不够的，因为勃姆石在其晶体结构中含有水。在这项研究中，我们研究了这种勃姆石薄膜的热处理。根据透射电子显微镜和透射傅里叶变换红外光谱，在673 K以上观察到脱水1h，勃姆石转变为稳定的β-氧化铝相。虽然发生了结构变化，但高透射率的光学性质保持和/或甚至改善。[doi：10.2320/matertrans.M2013026]
Anti-reflection coating, which exhibits higher transmittance than that of glass substrate itself, has been obtained by hydrothermal treatment of Al film in ultrapure water and hydrothermally-treated Al film was consisted of transparent boehmite (aluminum oxyhydroxide) (J. Appl. Phys. 106 (2009) 023524). However the stability of the hydrothermally-treated film is not enough, as boehmite contains water in its crystal structure. In this study, we examined the heat-treatment of such boehmite film. According to transmission electron microscopy and transmission Fouriertransform infrared spectroscopy, dehydration was observed at above 673K for 1 h and boehmite transformed to a stable phase of £-alumina. Though the structural change took place, the optical property of high transmittance remained and/or even improved. [doi:10.2320/matertrans.M2013026]