Mechanistic studies of the decomposition of trimethylaluminum on heated surfaces
Mechanistic studies of the decomposition of trimethylaluminum on heated surfaces
复制标题
三甲基铝在受热表面分解的机理研究
DOI：
--
复制
发表时间：
1985
期刊：
影响因子：
--
通讯作者：
M. Lin
中科院分区：
文献类型：
--
作者：
D. Squire;C. Dulcey;M. Lin
在低压条件下，研究了三甲基铝（TMA）在铜、铝、石英和砷化镓衬底上的分解随衬底温度的变化。气态产物的检测进行了激光多光子电离质谱（MPI/MS）的甲基自由基和铝物种和电子轰击质谱（EI/MS）的稳定物种。甲基自由基是在这些底物上方观察到的唯一气态反应产物，其产生的表观活化能为13±2 kcal/mol。在这些实验中采用氦气或氢气作为载气，在低压下既没有观察到乙烷也没有观察到甲烷。提出了一种机制来解释这些结果。
The decomposition of trimethylaluminum (TMA) on copper, aluminum, quartz, and gallium arsenide substrates has been studied as a function of substrate temperature from 550–900 K under low pressure conditions. Detection of gaseous products was carried out by laser multiphoton ionization mass spectrometry (MPI/MS) for methyl radical and aluminum species and electron impact mass spectrometry (EI/MS) for stable species. The methyl radical was the sole gaseous reaction product observed above these substrates, with an apparent activation energy for production of 13±2 kcal/mol. Neither ethane nor methane was observed at the low pressures employed in these experiments, with either helium or hydrogen as carrier gases. A mechanism is proposed to explain these results.