Viscosity of a Thin Film of UV Curable Resin in Pentafluoropropane
Viscosity of a Thin Film of UV Curable Resin in Pentafluoropropane
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五氟丙烷中紫外线固化树脂薄膜的粘度
DOI：
10.2494/photopolymer.23.45
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发表时间：
2010
影响因子：
0.8
通讯作者：
Qing Wang
中科院分区：
文献类型：
--
作者：
Hiroshima Hiroshi;Hidemasa Atobe;Qing Wang
众所周知，当通过旋涂形成薄的UV固化树脂膜时，UV纳米压印中使用的UV固化树脂表现出粘度变化。通过对使用五氟丙烷（PFP）的UV纳米压印的研究，发现PFP可以降低UV固化树脂PAK-01的粘度，这是一种有前途的实现高通量和可靠的UV纳米压印的方法。在本文中，使用我们独特的粘度测量装置，在与 UV 纳米压印相同的条件下使用未图案化模具，仔细研究了 PFP 对旋涂 PAK-01 粘度的影响，其中图案化模具与晶圆上的旋涂 UV 固化树脂接触。即使 PFP 暴露 1 秒，也会产生粘度降低的效果，并且该效果不依赖于 PFP 暴露时间。另一方面，PFP 暴露造成的效果会因暴露在空气中少于 1 秒而消失。即，当UV固化树脂膜与模具接触时存在的气体会影响UV固化树脂的粘度，而与气体暴露历史无关。我们还初步研究了一种可以捕获更多气体的有图案模具，发现有图案模具的粘度比无图案模具低。
It is known that UV curable resin used in UV nanoimprint shows viscosity change when thin UV-curable resin films are created by spin-coating. Through the study of UV nanoimprint using pentafluoropropane (PFP), which is a promising method enabling high-throughput and reliable UV nanoimprint, it was found that PFP may reduce the viscosity of UV curable resin PAK-01. In this paper, the effect of PFP on the viscosity of spin-coated PAK-01 is carefully studied with our unique viscosity measurement apparatus using an unpatterned mold under the same conditions as in UV nanoimprint where a patterned mold is contacted with spin-coated UV curable resin on a wafer. The effect of viscosity reduction occurs by PFP exposure even for 1s and the effect is not dependent on PFP exposure time. On the other hand, the effect caused by PFP exposure is lost by air exposure for less than 1 s. Namely, the gas, which exists at the moment when a UV curable resin film is making contact with a mold, impacts the viscosity of the UV curable resin regardless of the gas exposure history. We also preliminarily investigated a patterned mold which can trap a larger amount of gas and found that a patterned mold gives the lower viscosity than unpatterned one.