Thermoelastic effects in Pt IDTs. Impact on the behavior of high-temperature LGS-based SAW devices
Thermoelastic effects in Pt IDTs. Impact on the behavior of high-temperature LGS-based SAW devices
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DOI：
10.1109/ultsym.2013.0067
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发表时间：
2013-07
期刊：
影响因子：
--
通讯作者：
T. Aubert;P. Nicolay;F. Sarry
中科院分区：
文献类型：
--
作者：
T. Aubert;P. Nicolay;F. Sarry
在700°C温度下，对基于Pt电极和LGS取向的（0°，138.5°，26.7°）和（0°，22°，31°）欧拉角延迟线进行了实验研究。观察到不同Pt相对厚度的器件的频率-温度定律之间存在很大差异，特别是在（0°，22°，31°）取向上。模拟结果表明，这种现象可能与铂电极在温度升高时发生的大的热弹性效应有关。
Delay lines based on Pt electrodes and the LGS orientations with (0°, 138.5°, 26.7°) and (0°, 22°, 31°) Euler angles are experimentally investigated up to 700°C. Big discrepancies between the frequency-temperature laws for devices made with different Pt relative thicknesses are observed, in particular on the (0°, 22°, 31°) orientation. Simulations show that this phenomenon could be related to the large thermoelastic effects happening in Pt electrodes when the temperature rises.