Imaging confocal microscopy
Imaging confocal microscopy
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成像共焦显微镜
DOI：
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发表时间：
2020
期刊：
影响因子：
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通讯作者：
R. Artigas
中科院分区：
文献类型：
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作者：
R. Artigas
成像共焦显微镜是一种著名的表面形貌三维测量技术。共焦显微镜用于通过物镜的焦深获取一系列共焦图像。序列图像内每个像素的最高信号与地形的高度位置相关。与其他光学技术相比，共焦显微镜具有许多优势，例如具有高数值孔径，这意味着高横向分辨率和高可测量的局部斜率。应用领域非常广泛，从半导体、材料、纸张、能源、生物医学、光学、平板显示器等等。
Imaging confocal microscopy is a well-known technology for the 3D measurement of surface topography. A confocal microscope is used for the acquisition of a sequence of confocal images through the depth of focus of the objective. The highest signal within the images of the sequence for each pixel correlates with the height position of the topography. Confocal microscopy has many advantages over other optical techniques such as having a high numerical aperture, meaning a high lateral resolution and a high measurable local slope. The field of applications is very broad, from semiconductor, materials, paper, energy, biomedical, optics, flat panel displays, and more.