Friction and wear properties of micro textured DLC coated surfaces in boundary lubricated sliding
Friction and wear properties of micro textured DLC coated surfaces in boundary lubricated sliding
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DOI：
10.1023/b:tril.0000044504.76164.4e
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发表时间：
2004-10-01
影响因子：
3.2
通讯作者：
Jacobson, S
中科院分区：
文献类型：
--
作者：
Pettersson, U;Jacobson, S
本文研究了边界润滑织构表面的摩擦磨损性能。将润滑剂注入滑动接触界面并隔离磨损颗粒的能力与织构图案的形状、大小和取向有关。采用光刻和各向异性刻蚀技术对硅片进行刻蚀，得到了不同宽度和分布的正方形凹陷或平行凹槽的清晰表面纹理。随后，用PVD在晶片上涂上薄的、耐磨的DLC涂层，保留了衬底的纹理。在缺乏或充分润滑的边界润滑条件下，对滚珠-钢球的往复滑动表面进行了评估。
In the present study, the friction and wear properties of boundary lubricated textured surfaces were investigated. The capability to feed lubricant into the interface of a sliding contact and to isolate wear particles was related to the shape, size and orientation of the texture patterns. Well-defined surface textures of square depressions or parallel grooves of different widths and distributions were produced by lithography and anisotropic etching of silicon wafers. Subsequently the wafers were PVD coated with thin, wear resistant DLC coatings, retaining the substrate texture. The surfaces were evaluated in reciprocating sliding against a ball-bearing-steel ball under starved or amply lubricated boundary lubrication conditions.