Calculations of electron inelastic mean free paths. IX. Data for 41 elemental solids over the 50 eV to 30 keV range
Calculations of electron inelastic mean free paths. IX. Data for 41 elemental solids over the 50 eV to 30 keV range
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DOI：
10.1002/sia.3522
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发表时间：
2011-03-01
影响因子：
1.7
通讯作者：
Penn, D. R.
中科院分区：
文献类型：
--
作者：
Tanuma, S.;Powell, C. J.;Penn, D. R.
本文计算了41种元素固体（Li，Be，石墨，金刚石，玻璃态C，Na，Mg，Al，Si，K，Sc，Ti，V，Cr，Fe，Co，Ni，Cu，Ge，Y，Nb，Mo，Ru，Rh，Pd，Ag，In，Sn，Cs，Gd，Tb，Dy，Hf，Ta，W，Re，Os，Ir，Pt，Au和Bi）在电子能量从50 eV到30 keV范围内的非弹性平均自由程。IMFPs计算从实验光学数据使用完整的Penn算法的能量高达300 eV和更简单的单极近似更高的能量。计算的IMFP可以拟合到一个修改后的形式的Bethe方程的非弹性散射的电子在物质中的能量从50 eV到30 keV。这些拟合的平均均方根（RMS）偏差为0.48%。还将新的IMFP与来自预测TPP-2 M方程的IMFP进行了比较;在这些比较中，对于50 eV和30 keV之间的能量，平均RMS偏差为12.3%。该RMS偏差与先前在50 eV-2 keV范围的类似比较中发现的RMS偏差几乎相同。发现金刚石、石墨和铯的RMS偏差相对较大。如果在比较中排除这三个元素，则在50 eV和30 keV之间的平均RMS偏差为9.2%。我们发现令人满意的协议，我们计算的IMFP与IMFP从最近的计算和弹性峰电子光谱实验。版权所有（c）2010约翰威利父子有限公司。
We have calculated inelastic mean free paths (IMFPs) for 41 elemental solids (Li, Be, graphite, diamond, glassy C, Na, Mg, Al, Si, K, Sc, Ti, V, Cr, Fe, Co, Ni, Cu, Ge, Y, Nb, Mo, Ru, Rh, Pd, Ag, In, Sn, Cs, Gd, Tb, Dy, Hf, Ta, W, Re, Os, Ir, Pt, Au and Bi) for electron energies from 50 eV to 30 keV. The IMFPs were calculated from experimental optical data using the full Penn algorithm for energies up to 300 eV and the simpler single-pole approximation for higher energies. The calculated IMFPs could be fitted to a modified form of the Bethe equation for inelastic scattering of electrons in matter for energies from 50eV to 30 keV. The average root-mean-square (RMS) deviation in these fits was 0.48%. The new IMFPs were also compared with IMFPs from the predictive TPP-2M equation; in these comparisons, the average RMS deviation was 12.3% for energies between 50 eV and 30 keV. This RMS deviation is almost the same as that found previously in a similar comparison for the 50 eV-2 keV range. Relatively large RMS deviations were found for diamond, graphite and cesium. If these three elements were excluded in the comparison, the average RMS deviation was 9.2% between 50 eV and 30 keV. We found satisfactory agreement of our calculated IMFPs with IMFPs from recent calculations and from elastic-peak electron-spectroscopy experiments. Copyright (c) 2010 John Wiley & Sons, Ltd.