Self-consistent rate theory of submonolayer homoepitaxy with attachment/detachment kinetics
Self-consistent rate theory of submonolayer homoepitaxy with attachment/detachment kinetics
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具有附着/分离动力学的亚单层同质外延的自洽速率理论
DOI：
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发表时间：
1997
期刊：
影响因子：
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通讯作者：
A. Zangwill
中科院分区：
文献类型：
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作者：
G. S. Bales;A. Zangwill
用自洽速率方程和动力学蒙特卡罗模拟方法研究了亚单层外延生长过程中二维岛的可逆成核和生长过程。与大多数以前的工作不同，我们既考虑了原子从岛上分离的有限能垒的影响，也考虑了吸附原子进入岛内的有限势垒的影响。导出了考虑这些过程的岛边缘扩散场的正确边界条件。对于较小的脱附率，速率理论的解与平均单体密度和岛密度随覆盖度变化的模拟结果之间获得了定量的一致。{版权所有}{ITAL 1997}{ITAL The American Physitive Society}
The reversible nucleation and growth of two-dimensional islands during the submonolayer stage of epitaxial growth is studied with self-consistent rate equations and kinetic Monte Carlo simulations. In contrast to most previous work, we take account of the effects of both a finite energy barrier to the detachment of atoms from islands and a finite barrier to the incorporation of adatoms into islands. A correct boundary condition for the diffusion field at island edges is derived that takes account of these processes. For small detachment rates, quantitative agreement is obtained between the solutions to the rate theory and the simulations for the average monomer and island densities as a function of coverage. {copyright} {ital 1997} {ital The American Physical Society}