Study of very low airborne particle count in clean-unit system platform
Study of very low airborne particle count in clean-unit system platform
复制标题
洁净机组系统平台中极低空气颗粒数的研究
DOI：
10.1063/1.2006387
复制
发表时间：
2005
影响因子：
1.6
通讯作者：
A. Ishibashi
中科院分区：
文献类型：
--
作者：
H. Kaiju;Nobuyoshi Kawaguchi;A. Ishibashi
研究了由多个带反馈回路的可连接洁净箱组成的洁净单元系统平台的洁净度，从实验和理论上阐明了粒子数的时间依赖性，以实现高度洁净的环境。基于这一分析，我们已经证明，通过降低从系统内壁出来的颗粒密度，空气中的颗粒数量在直径为0.1μm时低至5颗粒∕立方英尺，在直径为0.2μm时低至0.6颗粒∕立方英尺，在直径为0.5μm时低至0.01颗粒∕立方英尺。具有反馈回路的清洁单元系统可以作为纳米技术和生物技术等领域跨学科实验和生产的平台。
Cleanliness of a clean-unit system platform consisting of multiply connectable clean boxes with feedback loop is studied and the time dependence of particle count is clarified experimentally and theoretically in order to achieve highly clean environment. Based on this analysis, we have demonstrated airborne particle counts as low as 5particles∕ft3 for the diameter of 0.1μm, 0.6 particles for 0.2μm, and 0.01 particles for 0.5μm by a reduction of particle density coming out from the in-wall in the system. The clean-unit system with feedback loop can serve as a platform for cross-disciplinary experiments and production for fields such as nanotechnologies and biotechnologies.