Mixed oxide coatings for optics
Mixed oxide coatings for optics
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DOI：
10.1364/ao.50.000c69
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发表时间：
2011-03-20
期刊：
影响因子：
1.9
通讯作者：
Tuennermann, Andreas
中科院分区：
文献类型：
--
作者：
Stenzel, Olaf;Wilbrandt, Steffen;Tuennermann, Andreas
材料混合物为合成具有定制光学和机械性能的涂层材料提供了新的可能性。我们展示了 HfO2、ZrO2 和 Al2O3 混合物的实验结果，寻求在 UV 涂层技术中的应用，而混合物是通过磁控溅射、离子束溅射、等离子体离子辅助沉积 (PIAD) 和电子束蒸发无辅助制备的。研究的特性包括折射率、光学间隙、热位移和机械应力。第一个用于紫外线应用的高反射器已由 PIAD 沉积。 (C) 2010 美国光学学会
Material mixtures offer new possibilities for synthesizing coating materials with tailored optical and mechanical properties. We present experimental results on mixtures of HfO2, ZrO2, and Al2O3, pursuing applications in UV coating technology, while the mixtures are prepared by magnetron sputtering, ion beam sputtering, plasma ion-assisted deposition (PIAD), and electron beam evaporation without assistance. The properties investigated include the refractive index, optical gap, thermal shift, and mechanical stress. The first high reflectors for UV applications have been deposited by PIAD. (C) 2010 Optical Society of America