Crystalline quality improvement of face-to-face annealed MOVPE-grown AlN on vicinal sapphire substrate with sputtered nucleation layer
Crystalline quality improvement of face-to-face annealed MOVPE-grown AlN on vicinal sapphire substrate with sputtered nucleation layer
复制标题
DOI：
10.1016/j.jcrysgro.2020.125722
复制
发表时间：
2020-09-01
影响因子：
1.8
通讯作者：
Miyake, Hideto
中科院分区：
文献类型：
--
作者：
Kuboya, Shigeyuki;Uesugi, Kenjiro;Miyake, Hideto
