Measurement of Surface Acoustic Wave on a Quartz Ball with Proximate Electrodes to Improve Performance of Ball Surface Acoustic Wave Device
Measurement of Surface Acoustic Wave on a Quartz Ball with Proximate Electrodes to Improve Performance of Ball Surface Acoustic Wave Device
复制标题
用邻近电极测量石英球上的表面声波以提高球表面声波装置的性能
DOI：
10.1143/jjap.46.4723
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发表时间：
2007
影响因子：
1.5
通讯作者：
K. Yamanaka
中科院分区：
文献类型：
--
作者：
S. Kai;Kazunori Ote;T. Mihara;T. Ohgi;N. Nakaso;I. Satoh;T. Fukiura;Hidekazu Tanaka;K. Yamanaka
为了提高球表面声波（SAW）器件的性能，我们已经开发出一种取向控制装置，找到一个石英晶体球的Z轴的光学双折射测量，并找到X和Y轴通过测量SAW的传播特性，使用叉指换能器（IDT），这是移动接近球使用一个平移阶段。球操纵器的真空吸盘的软弹簧防止在接触期间损坏球或IDT。卡盘的球保持器的凹形形状使得球中心和操纵器轴线能够重复对准。作为初步结果，我们证实了SAW速度变化具有60°的周期性，并成功地确定了石英球上的-Y轴等效方向。
In order to improve the performance of ball surface acoustic wave (SAW) devices, we have developed an orientation control apparatus to find the Z axis of a quartz crystal ball by an optical birefringence measurement, and to find the X and Y axes by measuring the propagation characteristics of a SAW using an interdigital transducer (IDT), which is moved close to the ball using a translation stage. The soft spring of the vacuum chuck of the ball manipulator prevented damage to the ball or IDT during the contact. The concave shape of the ball holder of the chuck enabled repeatable alignment of the ball center and the manipulator axis. As a preliminary result, we confirmed that the SAW velocity variation had 60° periodicity and succeeded in identifying the -Y axis-equivalent direction on the quartz ball.