Influence of magnetron sputtering process parameters on wear properties of steel/Cr3Si or Cr/MoSx
Influence of magnetron sputtering process parameters on wear properties of steel/Cr3Si or Cr/MoSx
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DOI：
10.1016/0257-8972(95)02605-3
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发表时间：
1995-12
影响因子：
5.4
通讯作者：
G. Weise;A. Teresiak;I. Bächer;P. Markschlaeger;G. Kampschulte
中科院分区：
文献类型：
--
作者：
G. Weise;A. Teresiak;I. Bächer;P. Markschlaeger;G. Kampschulte
The film system steel/Cr3Si or Cr/MoSxwas produced by r.f. and d.c. magnetron sputtering with variation of the following process parameters: working pressure PAr; sputter power P; and target-substrate distance TSA, in both intermittent and stationary modes. The layer system had a thicknesses < 1 μm; the interlayers were thinner than 100 nm. The chemical characterisation was performed using EDX (energy dispersive X-ray analysis); a structural characterisation was accomplished by X-ray diffraction. The chemical composition was changed by decreasing the TSA, increasing pAror P, and by changing the mode (intermittent or stationary). An increase in pArto values greater than 1.3 Pa at a TSA of 40 or 80 mm was found to lead to an increased oxygen content. The layers were microcrystalline and showed no texture for any parameter set. X-Ray diffraction patterns show mainly the (002) reflection with different degrees of ordering. The wear properties were investigated with the pin-on-disk test. The MoSxlayers with (002) reflections without additional (100) or (110) reflections showed only small abrasion. The formation of this modified MoSxlayer is the connecting link between process parameters and wear properties.
