Aerostatic precision glass bearing with an integrated polygonal mirror for scanning: a new method
Aerostatic precision glass bearing with an integrated polygonal mirror for scanning: a new method
复制标题
带有集成多角镜扫描的空气静压精密玻璃轴承：一种新方法
DOI：
10.1117/12.246799
复制
发表时间：
1996
期刊：
影响因子：
--
通讯作者：
V. Guyenot
中科院分区：
文献类型：
--
作者：
S. Risse;V. Guyenot
The demands of higher precision, higher speed, higher stiffness, and new files of application determine the improvements and new developments of precision bearings. In many applications air bearing systems are often the only alternative, especially when precise movements free of vibration, are necessary. The performance of high precision bearings for scanning is primarily dependent on the design and on the individual components. Main components are the bearing, the drive system, the controller and the optical mirror unit. Runout errors and vibration excitation lead to planar and roundness errors and to an increase in image errors. It is difficult to compensate the highly dynamic errors of a bearing system. Desirable is a very stiff, reproducible and very smooth running bearing system as a basis for good scanning results. Through suitable technology and choice of materials it is possible to optimize an air bearing for a special field of use. With the application of glass and glassceramic new possibilities for the production of precision bearings are present. One such example is a precision glass bearing made of these materials with an integrated polygonal mirror for scanning based upon the well-known design principle of double spherical air bearings.
