Multi Kilovolt Lithium Niobate Pyroelectric Cantilever Switched Power Supply

Multi Kilovolt Lithium Niobate Pyroelectric Cantilever Switched Power Supply
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多千伏铌酸锂热释电悬臂开关电源

DOI:
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发表时间:
2019
期刊:
IEEE/LEOS International Conference on Optical MEMS
影响因子:
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通讯作者:
A. Lal
A. Lal
中科院分区:
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文献类型:
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作者:
D. Ni;K. Vinayakumar;V. Pinrod;A. Lal

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微型机器人中使用的高压致动器可能需要几千伏才能产生足够的位移。功能机器人需要高压电子驱动系统,以便它可以集成在微型机器人中,对机器人尺寸和重量的影响最小。在这里,我们报告了一个概念验证的热释电高压发生器(PHVG)结合悬臂静电开关用于吸合模式,这表明了致动的压电致动器。静电开关与热释电LiNbO 3发生器的使用提供了一种从非常小的电池电压产生高电压的途径,并且能够以小尺寸和重量打开它们。我们已经演示了PHVG在环境中的输出电压高达1900 V,输入电压为15 V,温度变化为2-3°C。使用悬臂开关的吸合电压测量产生的高压。结构的缩放可以导致在10-20 kV范围内的低SWAP高压源的发展。
High voltage actuators used in micro-robotics can require several kilovolts for sufficient displacements. A high voltage electronics driving system is required for functional robotics so that it can be integrated within the microrobot with minimal impacts on robot size and weight. Here we report a proof-of-concept Pyroelectric High Voltage Generator (PHVG) combined with a cantilever electrostatic switch used in pull-in mode, which demonstrated actuations of a piezoelectric actuator. The use of an electrostatic switch with pyroelectric LiNbO3 generator provides a pathway to generate high voltages from very small battery voltages and the capability to turn them on with small size and weight. We have demonstrated output voltages up to 1900V from PHVG in the ambient with a 15V input voltage at a temperature change of 2-3°C. The high-voltage generated is measured using the pull-in voltage of the cantilever switch. Scaling of the structure can lead to the development of low-SWAP high-voltage sources in the 10–20 kV range.