Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces
Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces
复制标题
静电吸盘由聚合物静电感应纤维组成，用于处理表面粗糙的物体
DOI：
10.1088/0964-1726/22/9/095010
复制
发表时间：
2013
影响因子：
4.1
通讯作者：
and Shigeki Saito
中科院分区：
文献类型：
--
作者：
Radon Dhelika;Kenji Sawai;Kunio Takahashi;Wataru Takarada;Takeshi Kikutani;and Shigeki Saito
静电吸盘（ESC）是一种可逆的干胶，通过静电力夹紧物体。目前ESC仅用于具有平坦表面的物体，因为对于粗糙表面，吸引力减小。一种能够处理具有粗糙表面的物体的ESC将扩展其在MEMS（微机电系统）或光学部件处理中的应用。已经提出了由顺应性静电感应纤维组成的ESC用于这种用途，所述静电感应纤维符合表面的轮廓。本文旨在通过分步制造和分析，从理论和实验上观察产生的吸引力/压力，以进一步推进之前的研究。此外，还观察了所提出的纤维ESC对粗糙表面的行为。使用一个强大的机械静电模型的吸引力/压力的纤维ESC的理论研究。随后，纤维ESC的原型组成的10个纤维排列成一个角度，实验观察其吸引力/压力与粗糙表面的物体。观察到的表面的吸引力，这是建模为一个正弦波具有不同的振幅，通过它的纤维ESC的可行性是合理的。
An electrostatic chuck (ESC) is a type of reversible dry adhesive which clamps objects by means of electrostatic force. Currently an ESC is used only for objects having flat surfaces because the attractive force is reduced for rough surfaces. An ESC that can handle objects with rough surfaces will expand its applications to MEMS (micro electro mechanical system) or optical parts handling. An ESC consisting of compliant electrostatic inductive fibers which conform to the profile of the surface has been proposed for such use. This paper aims at furthering previous research by observing the attractive force/pressure generated, both theoretically and experimentally, through step-by-step fabrication and analysis. Additionally, how the proposed fiber ESC behaves toward rough surfaces is also observed. The attractive force/pressure of the fiber ESC is theoretically investigated using a robust mechano-electrostatic model. Subsequently, a prototype of the fiber ESC consisting of ten fibers arranged at an angle is employed to experimentally observe its attractive force/pressure for objects with rough surfaces. The attractive force of the surface which is modeled as a sinusoidal wave with various amplitudes is observed, through which the feasibility of a fiber ESC is justified.