Numerical analysis of the effect of bubble distribution on multiple-bubble behavior
Numerical analysis of the effect of bubble distribution on multiple-bubble behavior
复制标题
气泡分布对多气泡行为影响的数值分析
DOI：
10.1016/j.ultsonch.2019.104818
复制
发表时间：
2020
影响因子：
8.4
通讯作者：
J.
中科院分区：
文献类型：
--
作者：
Ochiai;N. and Ishimoto;J.
了解兆声场中的多气泡行为对于高效的兆声纳米器件清洗而不损伤图案是必不可少的。在这项研究中，我们数值研究了平衡半径和初始空隙率对多气泡行为和诱导压力的影响。我们分析了非球形的崩溃，合并，并使用可压缩的，局部均匀的气液两相介质模型的兆声场中的气泡破裂。用均匀平衡半径或气泡尺寸分布模拟气泡。结果表明，气泡行为和诱导压力主要取决于初始含气率。对于具有均匀平衡半径的气泡的情况，小气泡在大的初始空隙率下产生高的壁面压力。当存在尺寸分布时，具有小平衡半径的气泡对壁面压力的贡献很小，因为较大气泡的振荡的阻尼效应。此外，添加一个大的气泡抑制了气泡的共振行为，诱导高壁面压力。
Understanding multiple-bubble behavior in a megasonic field is essential for efficient megasonic nanodevice cleaning without pattern damage. In this study, we numerically studied the effects of equilibrium radius and initial void fraction on multiple-bubble behavior and induced pressure. We analyzed the nonspherical collapse, coalescence, and breakup of bubbles in a megasonic field using a compressible, locally homogeneous model of a gas-liquid two-phase medium. Bubbles were simulated with a uniform equilibrium radius or with a bubble size distribution. Our results indicate that the bubble behavior and induced pressure depended mainly on the initial void fraction. For the case of bubbles with uniform equilibrium radius, small bubbles generated high wall pressure at large initial void fractions. When there was a size distribution, bubbles with small equilibrium radii contributed little to the wall pressure because of the damping effect of the oscillation of larger bubbles. Furthermore, the addition of a large bubble suppressed the resonant behavior of the bubbles that induced high wall pressure.