Piezoelectric MEMS acoustic emission sensors
Piezoelectric MEMS acoustic emission sensors
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DOI：
10.1016/j.sna.2018.05.044
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发表时间：
2018-08-15
影响因子：
4.6
通讯作者：
Ozevin, Didem
中科院分区：
文献类型：
--
作者：
Kabir, Minoo;Kazari, Hanie;Ozevin, Didem
本文设计并表征了压电MEMS（压电-MEMS）传感器，用于检测主动缺陷释放的弹性波，即声发射（AE）。所设计的传感器在铺有压电层的硅膜片的振动驱动下工作在板弯曲模式或刚体模式下。所设计的装置包含两个不同的频率传感器，调谐到40千赫和200千赫。该微结构层由掺杂硅、氮化铝（AlN）和金属层组成，分别作为下电极、传感层和上电极。硅层还起质量弹簧系统的作用，其中可移动板与四个部分夹紧的梁连接到衬底。由于几何尺寸受到制造工艺设计规则的限制，因此通过衬底蚀刻工艺为40 kHz传感器提供了额外的质量。利用COMSOL Multiphysics软件对传感器进行了数值模拟，得到了传感器在激励下的频率响应和动态响应。然后，利用MEMSCAP代工厂提供的压电多用户MEMS工艺（PiezoMUMPs）制造传感器。通过机电特性实验验证了所设计传感器的性能。得到了每个传感器的面对面响应，并与传统的压电声发射传感器进行了性能比较。所研制的压电- mems声发射传感器具有占地面积小、成本低、工作时不需要偏置电压等优点。(C) 2018 Elsevier B.V.版权所有
In this paper, piezoelectric MEMS (piezo-MEMS) sensors are designed and characterized for detecting elastic waves released by active flaws, known as acoustic emission (AE). The designed sensors operate in plate flexural mode or rigid body mode driven by the vibration of silicon diaphragm where piezoelectric layer is deposited on. The designed device contains two different frequency sensors tuned to 40 kHz and 200 kHz. The microstructural layers consist of doped silicon, aluminum nitride (AlN) and metal layer, which function as the bottom electrode, sensing layer and top electrode, respectively. The silicon layer also functions as a mass-spring system where a movable plate is connected with four partially clamped beams to the substrate. As the geometry sizes are restricted by the design rules of the manufacturing process, an additional mass is provided for the 40 kHz sensor through the substrate etching process. The sensors are numerically modeled using COMSOL Multiphysics software to obtain the frequency response and the dynamic response under excitation. Afterwards, the sensors are manufactured using Piezoelectric Multi-User MEMS Process (PiezoMUMPs) provided by MEMSCAP foundry. The performance of the designed sensors is demonstrated through electromechanical characterization experiments. A face- to-face response is obtained for each sensor, and the performance of the designed sensors is compared with the conventional piezoelectric AE sensors. The developed piezo-MEMS AE sensors have advantages of small foot-print, low cost and no need for bias voltage for operation. (C) 2018 Elsevier B.V. All rights reserved.