Two-dimensional encoder with picometre resolution using lattice spacing on regular crystalline surface as standard
Two-dimensional encoder with picometre resolution using lattice spacing on regular crystalline surface as standard
复制标题
使用规则晶体表面上的晶格间距作为标准的具有皮米分辨率的二维编码器
DOI:
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发表时间:
2007
期刊:
影响因子:
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通讯作者:
M Ishige and C Patamaporn
中科院分区:
文献类型:
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作者:
M Aketagawa;H Honda;M Ishige and C Patamaporn