Friction and wear properties of CrAlN and CrVN films deposited by cathodic arc ion plating method
Friction and wear properties of CrAlN and CrVN films deposited by cathodic arc ion plating method
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DOI：
10.1016/s0257-8972(03)00937-x
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发表时间：
2004-01-30
影响因子：
5.4
通讯作者：
Aizawa, T
中科院分区：
文献类型：
--
作者：
Uchida, M;Nihira, N;Aizawa, T
氮化铬(CrN)薄膜在耐蚀性、耐磨性、摩擦性能等方面均优于氮化钛薄膜。CRN已广泛应用于模具、机械零件和滑动零件。为了改善CrN薄膜的摩擦学性能，本文在CrN薄膜中添加了铝和钒。采用阴极弧离子镀方法沉积了CrN、CrAlN和CrVN。用晶体X射线衍射仪对沉积的薄膜进行了表征。用于化学成分分析的结构鉴定和能量色散X射线光谱分析。由于CrN、VN和AlN的晶体结构和晶格常数接近，所有薄膜中出现的衍射峰在位置和取向上都是相似的。Al沉积的膜层成分为Cr70Al30N，V沉积的膜层为Cr50V50N。努氏硬度测试表明，CrAlN的硬度高于CrN和CrVN。摩擦磨损试验是在球盘式摩擦试验机上进行的，以不锈钢和硬质合金球为对偶材料，在有和没有润滑剂的情况下进行。在球盘式摩擦磨损试验机上，含不锈钢球的CrN薄膜在无润滑条件下发生了剥落，而CrAlN和CrVN薄膜则没有发生剥落现象。在硬质合金球磨损试验中，CrN膜上的磨痕深度达到了基材。在发动机油中，CrN膜和CrAlN膜的摩擦系数基本相同，但CrVN膜的摩擦系数低于其他膜。V的加入成功地改善了CrN薄膜的摩擦学性能。(C)2003爱思唯尔B.V.保留所有权利。
Chromium nitride (CrN) films are superior to the titanium nitride film in corrosion and wear resistances, and friction behavior. CrN has been widely applied to the molding dies, machine parts and sliding part. In the present paper, additions of aluminum and vanadium into CrN films were performed with an expectation of improvement in tribological properties. CrN, CrAlN and CrVN were deposited by a cathodic arc ion plating. Deposited films were characterized by X-ray diffraction for crystal. structure identification and energy-dispersive X-ray spectroscopy for chemical composition analysis. Diffraction peaks that appeared were similar in position and orientation in all films because the crystal structure and the lattice constant for CrN, VN and AlN are close to each other. The composition of the film deposited with Al and V was estimated to be Cr70Al30N and Cr50V50N, respectively. Knoop hardness test showed that CrAlN was harder than CrN and CrVN. Friction and wear tests were carried out by a ball-on-disk tribometer with stainless steel and cemented carbide balls as a counter material, with and without lubricant. Flaking occurred on CrN with stainless steel ball in wear tests without lubrication by ball-on-disk tribometer, but that did not occur on CrAlN and CrVN films. In the case of the wear test with cemented carbide ball, depth of wear track on CrN film reached to the substrate. The friction coefficient was almost the same for CrN and CrAlN films; however, that for CrVN film was lower than other films, in motor oil. V addition into CrN film successfully improved its tribological properties. (C) 2003 Elsevier B.V. All rights reserved.