Femtosecond laser-induced modification at aluminum/diamond interface
Femtosecond laser-induced modification at aluminum/diamond interface
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DOI：
10.7567/jjap.56.026601
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发表时间：
2017-01
影响因子：
1.5
通讯作者：
T. Okada;T. Tomita;Tomoyuki Ueki;Y. Masai;Y. Bando;Yasuhiro Tanaka
中科院分区：
文献类型：
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作者：
T. Okada;T. Tomita;Tomoyuki Ueki;Y. Masai;Y. Bando;Yasuhiro Tanaka
我们研究了飞秒激光诱导的Al/金刚石界面修饰。该界面从背面通过金刚石衬底照射，其对激光束是透明的。使用极高的脉冲能量，即200和100µJ/脉冲照射界面。用常规透射电镜和高压透射电镜观察了激光辐照线的截面。激光辐照界面的改变表现为在变形的Al膜和金刚石衬底之间形成非晶态相。非晶相的主要化学成分被确定为碳，从金刚石基体中吹出。新形成的非晶相与金刚石衬底之间的界面是凹的。此外，只有在高能脉冲照射的样品中才会形成平均间距为激光波长四分之一的精细纹波结构。
We investigated femtosecond-laser-induced modification at an Al/diamond interface. The interface was irradiated from the backside through the diamond substrate, which is transparent to the laser beam. Extremely high pulse energies, i.e., 200 and 100 µJ/pulse, were used to irradiate the interface. The cross-section of the laser-irradiated line was observed with conventional and high-voltage transmission electron microscopy. The modification of the laser-irradiated interface was characterized by the formation of an amorphous phase sandwiched between the deformed Al film and the diamond substrate. The major chemical component of the amorphous phase was identified as carbon, blown from the diamond substrate. The newly formed interface between the amorphous phase and the diamond substrate was concave. In addition, a fine ripple structure with an average spacing one-quarter the wavelength of the laser light was formed only in the sample irradiated by the higher-energy pulses.