Fabrication and measurement of wireless pressure-sensitive micro-device based on high temperature co-fired ceramics technology
Fabrication and measurement of wireless pressure-sensitive micro-device based on high temperature co-fired ceramics technology
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DOI：
10.1108/sr-09-2012-689
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发表时间：
2014-07
期刊：
影响因子：
1.6
通讯作者：
Shi-jun Zheng;Ting Liang;Yinpin Hong;Ying Li;J. Xiong
中科院分区：
文献类型：
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作者：
Shi-jun Zheng;Ting Liang;Yinpin Hong;Ying Li;J. Xiong
Purpose – The paper aims to highlight a wireless pressure-sensitive micro-device with high pressure sensitivity and accuracy. It is based on the partially stabilized Zirconia (PSZ) ceramic material which is capable of excellent elasticity and robustness. Design/methodology/approach – The paper begins with a general introduction to the wireless interrogating method and then the fabrication processes of the device using high temperature co-fired ceramic (HTCC) technology are described in detail. Findings – A passive wireless micro-device made from a novel material-PSZ ceramic on pressure monitoring is fabricated and tested and the authors proved that the device possesses an advantages over some proposed wireless sensors on interrogating distance. The pressure sensitivity of the device is 336 kHz/bar at readout distance 2.5 cm and that is an excellent property. Originality/value – The paper shows a new design scheme for wireless pressure measurement. The future application of the wireless device indicates th...
