Large scale membrane transfer process : Its application to single-crystal-silicon continuous membrane deformable mirror
Large scale membrane transfer process : Its application to single-crystal-silicon continuous membrane deformable mirror
复制标题
大规模膜转移工艺：在单晶硅连续膜可变形镜中的应用
DOI：
10.1088/0960-1317/23/12/125003
复制
发表时间：
2013
影响因子：
2.3
通讯作者：
Masayuki Akiyama and Kazuhiro Hane
中科院分区：
文献类型：
--
作者：
Tong Wu;Takashi Sasaki;Masayuki Akiyama and Kazuhiro Hane
本文描述了一种为构建大型膜装置而开发的大规模膜转移工艺，通过将连续的单晶硅膜从一个基底转移到另一个基底。该技术用于制造大行程变形镜。双压电晶片弹簧阵列用于在镜膜和电极之间产生大的气隙。通过Au-Si共晶键合和随后的全干式脱模工艺，成功地将1.9 mm×1.9 mm×2 µm单晶硅膜转移到电极基底上。该工艺提供了一种将独立式大型连续单晶硅转移到具有大气隙的柔性悬挂弹簧阵列的有效方法。
This paper describes a large-scale membrane transfer process developed for the construction of large-scale membrane devices via the transfer of continuous single-crystal-silicon membranes from one substrate to another. This technique is applied for fabricating a large stroke deformable mirror. A bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A 1.9 mm× 1.9 mm× 2 µm single-crystal-silicon membrane is successfully transferred to the electrode substrate by Au–Si eutectic bonding and the subsequent all-dry release process. This process provides an effective approach for transferring a free-standing large continuous single-crystal-silicon to a flexible suspension spring array with a large air gap.