Fabrication and analysis of printable fused-silica based double paddle oscillators
Fabrication and analysis of printable fused-silica based double paddle oscillators
复制标题
可打印熔融石英双桨振荡器的制造和分析
DOI：
10.1016/j.sna.2023.114783
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发表时间：
2023
期刊：
影响因子：
--
通讯作者：
Atwa Y
中科院分区：
文献类型：
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作者：
Atwa Y
本文介绍了一种新的制造方法，用于生产双桨振荡器的几何形状，使用可印刷的熔融石英玻璃悬浮液。该方法包括将可印刷的玻璃混合物浇铸到聚合物模具中，随后进行多个热处理步骤。这一工艺可生产出透明、高质量的熔融石英器件。我们制造熔融石英器件的方法易于使用，非常坚固，需要较少的制造阶段，并能够批量制造多个器件。在这项工作中，我们调查的品质因数和前两个谐振模式的熔融石英为基础的双桨振荡器（DPOs）具有不同的厚度，使用计算和实验技术。我们可以通过实验检测两种谐振模式，包括0.5 mm、0.8 mm和1 mm厚的DPO的悬臂和标准扭转模式，较厚的器件提供更高的品质因数。此外，我们优化的制造方法可确保器件良率超过90%。我们的方法中使用的所有制造步骤都可以在洁净室设施之外完成。
This paper describes a new manufacturing method for producing a double paddle oscillator geometry using a printable fused silica glass suspension. The method includes casting a printable glass mixture into a polymer mold, followed by multiple thermal processing steps. This process results in the production of clear and high-quality fused silica devices. Our approach for fabricating fused silica devices is easy to use, extremely robust, needs fewer manufacturing stages, and enables batch fabrication of multiple devices. In this work, we investigate the quality factor and first two resonance modes of fused silica based double paddle oscillators (DPOs) with varying thicknesses using computational and experimental techniques. We can experimentally detect two resonance modes, including cantilever and standard torsion modes for 0.5 mm, 0.8 mm, and 1 mm thick DPOs, with thicker devices providing a higher quality factor. Additionally, our optimized fabrication method ensures a device yield of over 90 %. All fabrication steps used in our method can be accomplished outside of a cleanroom facility.